Temperature Measurement during Millisecond Annealing: Ripple Pyrometry for Flash Lamp Annealers (MatWerk)

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Management number 233296404 Release Date 2026/06/27 List Price US$12.44 Model Number 233296404
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Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method’s suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures. Read more

ISBN10 3658113871
ISBN13 978-3658113872
Edition 1st ed. 2015
Language English
Publisher Springer
Dimensions 5.83 x 0.32 x 8.27 inches
Item Weight 6.4 ounces
Print length 137 pages
Publication date January 14, 2016

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