| Management number | 233296404 | Release Date | 2026/06/27 | List Price | US$12.44 | Model Number | 233296404 | ||
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Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method’s suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures. Read more
| ISBN10 | 3658113871 |
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| ISBN13 | 978-3658113872 |
| Edition | 1st ed. 2015 |
| Language | English |
| Publisher | Springer |
| Dimensions | 5.83 x 0.32 x 8.27 inches |
| Item Weight | 6.4 ounces |
| Print length | 137 pages |
| Publication date | January 14, 2016 |
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